Scholarly Index
Mark D. Smith
KLA (United States); 615 total citations; 91 total publications; best world rank #505
KLA (United States)
615Total citations
91Total publications
13H-index
Published ranking records
| Field | Window | World rank | National rank | Impact score |
|---|---|---|---|---|
| Advancements in Photolithography Techniques | Lifetime | 505 | US 202 | 94.89 |