Scholarly Index
Satoru Shimura
Tokyo Electron (Japan); 197 total citations; 68 total publications; best world rank #168
Tokyo Electron (Japan)
197Total citations
68Total publications
7H-index
Published ranking records
| Field | Window | World rank | National rank | Impact score |
|---|---|---|---|---|
| Advancements in Photolithography Techniques | 2021-2025 | 168 | JP 6 | 86.22 |
| Electron and X-Ray Spectroscopy Techniques | 2021-2025 | 780 | JP 43 | 73.49 |