Scholarly Index
Kazuo Sakamoto
Tokyo Electron (Japan); 685 total citations; 81 total publications; best world rank #855
Tokyo Electron (Japan)
685Total citations
81Total publications
13H-index
Published ranking records
| Field | Window | World rank | National rank | Impact score |
|---|---|---|---|---|
| Nanofabrication and Lithography Techniques | 2021-2025 | 855 | JP 57 | 49.60 |