Scholarly Index
Hidetami Yaegashi
Tokyo Electron (Japan); 442 total citations; 74 total publications; best world rank #846
Tokyo Electron (Japan)
442Total citations
74Total publications
12H-index
Published ranking records
| Field | Window | World rank | National rank | Impact score |
|---|---|---|---|---|
| Advancements in Photolithography Techniques | Lifetime | 846 | JP 127 | 92.95 |