Scholarly Index
Anatoly Burov
Shanghai Micro Electronics Equipment (China); 39 total citations; 18 total publications; best world rank #295
Shanghai Micro Electronics Equipment (China)
39Total citations
18Total publications
4H-index
Published ranking records
| Field | Window | World rank | National rank | Impact score |
|---|---|---|---|---|
| Advancements in Photolithography Techniques | 2021-2025 | 295 | CN 103 | 79.50 |