Scholarly Index

Harutaka Mekaru

National Institute of Advanced Industrial Science and Technology; 1,293 total citations; 138 total publications; best world rank #511

National Institute of Advanced Industrial Science and Technology

1,293Total citations
138Total publications
17H-index

Published ranking records

FieldWindowWorld rankNational rankImpact score
Advancements in Photolithography TechniquesLifetime511JP 6494.85
Nanofabrication and Lithography TechniquesLifetime828JP 7792.59